Menlosystems
Menlo Systems GmbH is a spin-off from the renowned Max-Planck-Institute for Quantum Optics. Profe……...
Sputter Deposition System for Reproducible Thin Film Layers: 032 PRIMS
PREVAC has introduced a simple and full functional sputter deposition system, called 032 PRIMS, for applying reproducible thin film layers.
The system is supplied with magnetron sputtering sources (for inorganics and metals), mounted in sputter-down configuration. It also features a turbomolecular pump with a manual throttle valve.
The 032 PRIMS system has a small process chamber size that helps reach the base pressure within a short time. A unique deposition rate checking system is also available.
Features
Size: Compact design
Base pressure range: 10–7 mbar
Process chamber diameter: Ø 355 mm
Substrate stage for up to 2″ diameter samples
Ports for up to three 2″ magnetron sources
Rapid turbo-molecular pumping system
Internal shield against chamber contamination
Process chamber is equipped with a full size vacuum door for easy substrate or target replacement
Options
Process automation
Substrate heating up to 600 °C
Substrate/sample stage rotation
Co-deposition
Deposition rate measurement
The 032 PRIMS system is fitted with MS2 63C1 magnetron sources and new M600DC-PS power supply.
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