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SPTS Technologies, a KLA company, designs, manufactures, sells, and supports advanced etch, and deposition equipment and process technologies for the global semiconductor and microdevice industries, with focus on the MEMS, advanced packaging, high speed RF device, power management and photonics sectors. The solutions offered by SPTS include industry leading silicon etch, dielectric etch, dry-release etch, PVD, MVD® and PECVD, all available with a range of wafer-handling options applicable to R&D, pilot production, or volume production environments.
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