SIMS Workstation: UHV Surface Analysis System for Thin Film Depth Profiling from Hiden Analytical

The Hiden SIMS workstation is designed to handle high performance static and dynamic SIMS applications for detailed surface composition analysis and depth profiling.

The SNMS facility complements the SIMS method, thereby providing quantification for thin film composition measurements. The latest SIMS-on-a-Flange from Hiden offers a complete SIMS facility on a single UHV conflat type flange.

Key Features

The main features of the SIMS workstation are:

Hiden MAXIM SIMS analyser operating under MASsoft 7 Professional for ppb analysis

Built-in ioniser for efficient SNMS testing

IG20 Gas, IG5C Caesium, IFG200 FAB or high performance liquid gallium guns

Integral ion gun raster control with signal gating for depth profiling

Electron flood gun option for charge neutralisation in insulator studies

Vacuum chamber bakeout heaters

Rapid sample transfer, sample holder and manipulator with load lock

Several differentially pumped primary excitation source options

UHV manipulator for optimum sample positioning

SIMS elemental imaging option with ESM LabVIEW SIMS imaging program

Static SIMS spectral library available

Automatic mass alignment for optimum SIMS performance

Automatic SIMS ion optics lens tuning

Applications

The main applications of the SIMS workstation are:

Catalysis

Surface analysis

Nanotechnology

Surface science

Thin film and surface engineering