SEM-Base® VI: Ultimate Vibration Solution for Advanced Microscopy

SEM-Base^®VIisthe next generation in STACIS active piezoelectric vibration cancellation.

SEM-BaseVIcan support many Focused Ion Beam (FIB) and Small Dual Beam instruments, as well asall commercial Scanning Electron Microscopes (SEMs).

SEM-BaseVIoffers enhanced vibration isolation performance, a faster, more robust controller, and an advanced graphical user interface (GUI). SEM-BaseVIwill enable more labs and facilities to achieve the level of floor vibration required to satisfy the tool manufacturer's specifications.

SEM-Base VI employs a unique “serial architecture” where the vibration sensors quantify floor vibration, not payload vibration. This guarantees that contrary to other designs, payload resonances do not integrally restrict vibration isolation or result in instability.

For maximum sensitivity in the hard-to-measure sub-Hz range, the vibration sensors are low-frequency inertial velocity sensors. Integrated with the unique piezo-actuator technology, SEM-Base VI attains very high levels of vibration cancellation, even on already quiet floors.

On average, SEM-Base VI offers 6 dB more vibration isolation compared to the earlier models. In addition, the DC-2020, which is TMC’s next-generation controller, characterizes a new dual-core processor and offers tool owners and scientists a very practical and user-friendly graphical interface for operational peace of mind and quick system assessment.

When connecting over Ethernet, the DC-2020 creates the SEM-Base GUI in the user's browser without having to install any additional software or application programs. Alternatively, the user can interface with the controller via an onboard menu-driven Liquid Crystal Display (LCD).

The SEM-Base VI Advantage

Active Inertial Vibration Cancellation – SEM-Base VI employs high-sensitivity, low-frequency inertial velocity sensors to attain high levels of vibration attenuation, even on quiet floors.

Hard-Mount Technology – SEM-Base VI is compatible with all internal SEM vibration control systems and aggressively mitigates low-frequency floor vibration starting at 0.6 Hz.

Serial Design with Piezoelectric Technology – The unique serial design and proprietary high-force piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2 Hz.

Specifications

Performance Specifications. Source: TMC Vibration Control

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Active degrees of freedom	6
Active bandwidth	0.6 Hz - 100 Hz
Passive natural frequency	12 Hz nominal
Effective active resonant frequency	0.5 Hz
Isolation at 1 Hz	40% - 70%
Isolation at 2 Hz	90%
Isolation at≥3 Hz	90-98%
Internal noise	<0.1 nm RMS
Operating load range	Standard capacity: 900 - 2,500 lbs (408 - 1134 kg)High capacity: 2,500 - 3,200lbs (1134 - 1452 kg)
Magnetic field emitted at maximum4 in.(102 mm) from the platform	<0.02μG broadband RMS

Design, Dimensions, and Environmental and Utility Requirements. Source: TMC Vibration Control

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Environmental and safety	CE and RoHS compliant
Active isolation elements	Piezoelectric actuators with minimum 3300 lb. (1500 kg) capacity receive signal from a high-voltage amplifier with an output of up to 800 VDC. Vertical actuators support the isolated payload.
Passive isolation element	single stiff elastomer (no compressed air supply required)
Vibration sensor elements	downward facing geophone type inertial sensorsthat measure floor vibration below the isolatorand deliver voltage proportional to the velocity of vibration motion
Active feedback control loop	Floor vibration is measured, processedand attenuated below the springsupporting the isolated surface
Dimensions (WxD)	35.25 x 44.25 in.895 x 1124 mm
Height	6.3 in. (160 mm) nominal,doesn't change when SEM-Base is switched off
Operating temperature	50° - 90° F10° - 32° C
Storage temperature	-40° - 130° F-40° - 55° C
Humidity	< 80% @ 68° F \| 20° C, Maximum dewpoint 18 degrees C
System power requirements	100, 120, 230, 240 VAC50/60 Hz AC; <600 WCE compliant
Floor displacement	<800 μin. (20 μm) below 10 Hz

Built-in Controller Specifications. Source: TMC Vibration Control

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Processor	150/75 MHz dual core
Sampling rate	10 kHz
Analog outputs	16 channels
Analog inputs	16 channels
Status light	single LED
Front panel ports	1x serial USB 2.01x serial Micro-USB1x Ethernet RJ-452x BNC
User interface	Front panel LCD displayCharacter menu on HyperTerminalExtended GUI for Microsoft WindowsEmbedded Ethernet GUI