SC450-LL

The Advanced, Magnetron Sputtering System Model SC450-LL from Semicore is a highly reliable and cost-effective system, which provides high performance. Semicore is an established designer and manufacturer of precision thin film vacuum deposition systems and products.

The company’s design initiatives and engineering capabilities contribute effectively to the capabilities, quality and necessary economy of the innovative Magnetron Sputtering system SC450-LL.

The Model SC450-LL has the capacity to accommodate a number of substrate sizes/shapes, and features an active decomposition area up to 200 mm (8”) diameter. It is designed with completely automatic integrated controls and multiple-process gas capability.

Key Features

The main features of the SC450-LL are as follows:

Research and development prototyping

Co-deposition or sequential modes

Small volume, quick cycle processing

Multiple sources up to four

Integral cathode shutter

Substrate table – cooling/heating, bias/etch, rotation

Advanced Fast Cycle Load-Lock is also provided

Lasting dependability

Magnetron sources: 50 mm (2”), 75 mm ( 3”), or 100 mm (4”)

Confocal cathode arrangement

HF RF or MF RF, DC and pulse DC power supplies

In-situ cathode tilt

Customer Testimonial

Semicore Equipment, Inc. supplied us with compact sputtering tools – SC250 and SC450LL. Both tools have highly integrated components, including magnetron sputtering, vacuum system, etc., and have a slim design to fit any limited lab space. The unified graphical interface is user friendly, but is also powerful and professional and allows control of all system components through simple touch screen. Both tools provide superior performance, including high film quality, excellent across-wafer uniformity and also high product throughput. These tools are ideal for R&D lab or small volume manufacturing. We are also impressed by Semicore’s quality customer service. Their engineering staffs are knowledgeable and responsible. They are dedicated to meeting their commitments to us and provided excellent service during system/tool set up and normal service call. We would be delighted to do business with this team again.

Xiaojun Yu, Vice President of Engineering, Royole Corporation