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S neox Grand Format - Advanced 3D Surface Measurement
With its comprehensive hardware and software package, the S neox Grand Format is intended for large panel 3D surface measurements in the semiconductor, display, and PCB sectors.
It offers limitless measurement potential, featuring an extensive 600x600mm travel range and a remarkable speed of one meter per second. The closed-loop XY gantry system ensures consistent performance, no matter the sample weight.
Image Credit: Sensofar Metrology
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Certified for Semiconductor Characterization
Image Credit: Sensofar Metrology
SEMI® S2 – SEMI® S8 –
SEMI® F47– NFPA® 79
Certified by TÜV Rheinland
Highest Measurement Versatility
With three distinct optical technologies available for each unique sample, the measuring sensor, the S neox Cleanroom, can image with the most accurate technology possible, attaining subnanometer precision.
Image Credit: Sensofar Metrology
Interferometry
Image Credit: Sensofar Metrology
Confocal
Image Credit: Sensofar Metrology
Ai Focus Variation
Image Credit: Sensofar Metrology
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Cleanroom-Friendly
The measuring sensor is class 1 compliant.
The enclosure is composed of stainless steel to reduce particle emissions.
Image Credit: Sensofar Metrology
Integrated Software Solutions
Built-In Acquisition Software
This sophisticated metrology instrument is entirely managed by the user-friendly SensoSCAN, which provides improved functionality for measurement automation.
Image Credit: Sensofar Metrology
General Surface Analysis
Image Credit: Sensofar Metrology
SensoPRO is a plugin-based software that effectively manages massive amounts of data while identifying certain traits. To satisfy the demands of analysis automation in the consumer electronics industry, they have offered a variety of bespoke plugins.
Rapid Quality Control
SensoPRO is a plugin-based program that effectively manages massive amounts of data while identifying particular features. To satisfy the demands of analysis automation in the consumer electronics industry, we have offered a variety of bespoke plugins.
Image Credit: Sensofar Metrology
The device has a large travel range of 600×600 mm and can reach speeds of up to one meter per second.
Image Credit: Sensofar Metrology
The closed-loop XY gantry design ensures consistent performance, regardless of the sample weight.
System Specifications
Source: Sensofar Metrology
| Measuring principles | Confocal, PSI, ePSI, CSI, Ai Focus Variation and Thin Film |
| Measurement types | Image, 3D, 3D thickness, profiles and coordinates |
| Camera | 5 Mpx: 2448x2048 px (150 fps) |
| Range of magnifications B | Brightfield: 2.5X - 150X | Interferometry: 2.5X - 100X |
| Field of view | From 0.11 to 6.7 mm (single shot) |
| Vertical scan range | Linear stage: 40 mm; Piezoelectric scanner: 200 µm (optional) |
| Measurement noise1 | 1 Down to 0.01 nm |
| Optical resolution2 | Down to 148 nm |
| Accuracy3 | <0.7% |
| Repeatability4 | <0.02% |
| LED light sources | Red (630 nm); green (530 nm); blue (460 nm); white (575 nm; center) |
| Nosepiece | 6-position fully motorized |
| Sample weight | Up to 500 kg |
| Sample height | t 28-68 mm (customizable) |
| User management rights | Administrator, supervisor, advanced operator, operator |
| Advanced software analysis | Inc: SensoVIEW; Op: SensoPRO, SensoMAP |
| Computer | Latest INTEL processor; 3840x2160 pixels resolution (4K) (27”) |
| Operating system | Microsoft Windows 10, 64-bit |
| Dimensions5 | 5 1600x1500x1500 mm |
| Power6 | Option 1: 230 VAC phase to neutral. 50/60 Hz single-phase (1P+N+PE)Option 2: 208 VAC phase to phase. 50/60 Hz three-phase (3P+N+PE) |
| Environment | Temperature 10 ºC to 35 ºC; Humidity <80 % RH; Altitude <1000 m |
1 L&S: Line and Space. Values for blue LED and 150X 0.95NA. 2 Values for PSI and piezo. 3 Values performed with piezo and 50X magnification for a step height of 48600 µm. 4 Values performed with piezo and 50X magnification for a step height of 48600 µm. 5 Dimensions of the space occupied by the cabin.6 Option 1 fulfills EN 60204-1:2018; Option 2, NFPA 79:2021.
Gantry XY Stage
Source: Sensofar Metrology
| Positioning system | Two axes gantry: XY translation of the head |
| Control type | Linear close loop |
| Travel range | 600x600 mm |
| Accuracy | 3 µm |
| Repeatability | 0.21 µm |
| Travel speed | Max. 1 m/s |
| Deceleration speed | 200 ms |
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Dimensions
mm (inch)
Image Credit: Sensofar Metrology
Sensofar has been a member of the International Organization for Standardization’s Technical Committee (ISO/TC213 WG16) since 2007.
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