S neox Cleanroom—For Optical Metrology

The S neox Cleanroom represents a previously unheard-of technological turning point for optical metrology. It offers the most versatility within manufacturing settings.

With its four different light sources and four-in-one technology, the S neox Cleanroomoffers unmatched adaptability for shifting application requirements.

Image Credit Sensofar Metrology

It has been meticulously designed to be ISO Class 1 and ESD compatible.

Image Credit: Sensofar Metrology

Piezoelectric Z motor integration is an option for the S neox Cleanroom,improvingperformance. It also covers thicknesses between 50 nm and 5 mm.

Image Credit: Sensofar Metrology

Focus on the sample’s surface and the integrable head will automatically determine the best acquisition setting for any measurement with this equipmentwhen using the 3D Auto mode.

Image Credit: Sensofar Metrology

Objective Lenses

Table 1. Source: Sensofar Metrology

System Specifications

Table 2. Source: Sensofar Metrology

S neox Cleanroom sensor, the highest flexibility compatible with Cleanroom - AdsPlay

Dimensions

Image Credit: Sensofar Metrology

¹ Maximum field of view with 3/2” camera and 0.5X optics.² Pixel size on the surface. ³ L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Spatial sampling could limit the optical resolution for interferometric objectives. Values for blue LED. ⁴ Measurement noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For interferometry objectives, PSI, 10 phase averages. The 0.01 nm are achieved with Piezo stage scanner and temperature-controlled room. Values for green LED (white LED for CSI). Values obtained in a VC-E vibration environment. ⁵ On smooth surfaces. Up to 86° on rough surfaces. ⁶ This is the weight of the sensor head with one objective in the turret.