[db:国别翻译]美国相对论空间
/9-9-I-9M-9M-9-9A-9-9G-9G-9E-1/ 相对论是第一个也是唯一通过整合智能机器人，软件和专有金属3D打印……...
S mart 2—The Only Autonomous Areal Confocal Profilometer
The only autonomous areal confocal profilometer on the market is the S mart 2. It is a breakthrough in the optical field because of its potent features and compact design.
Never before has installing a Sensofar system been so simple; the S mart 2 only requires two single connections, an ethernet cable, and a power source.
Image Credit: Sensofar Metrology
Due to its small width (90 mm), the integrable head can be installed in areas without obstructing users or production processes.
Image Credit: Sensofar Metrology
The S mart 2 has all the electronics, including the computing power, inside the head and was created to be incredibly simple to integrate.
Image Credit: Sensofar Metrology
For a metrological tool to operate correctly, the temperature is essential. A highly effective passive cooling system is the solution to keep the system operational.
Image Credit: Sensofar Metrology
In contrast to point or line confocal chromatics, the S mart 2 areal confocal capability images an area at a time, so the lateral resolution and X and Y remain the same.
Image Credit: Sensofar Metrology
The S Mart 2 includes three technologies to measure in the same head, including AI Focus Variation, Confocal, and Interferometry, to scan with the most appropriate technology.
Image Credit: Sensofar Metrology
Image Credit: Sensofar Metrology
Image Credit: Sensofar Metrology
Image Credit: Sensofar Metrology
Simply concentrate on the surface, and the S mart sensor will handle the rest. The product portfolio for these sensors has been created to meet the automatization needs that are typically present in production lines.
Image Credit: Sensofar Metrology
Image Credit: Sensofar Metrology
The sensor locates the focus, optimizes the light and Z range, and the user receives the result after just one click.
Image credit: Sensofar Metrology
System Specifications
Table 1. Objective lenses - Brightfield.Source: Sensofar Metrology
| MAG | 5X | 10X | 20X | 50X |
|---|---|---|---|---|
| NA | 0.15 | 0.30 | 0.45 | 0.80 |
| WD (mm) | 23.5 | 17.5 | 4.5 | 1.0 |
| FOV1(µm) | 2820 x 2820 | 1410 x 1410 | 700 x 700 | 280 x 280 |
| Spatial sampling2(µm) | 2.76 | 1.38 | 0.69 | 0.27 |
| Optical resolution3(µm) | 1.11 | 0.55 | 0.37 | 0.21 |
| Measurement noise4(nm) | 90 | 35 | 10 | 4 |
| Maximum slope5(º) | 9 | 17 | 27 | 53 |
1Maximum field of view with 2/3” camera and 0.25X optics.2Pixel size on the surface.3L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for blue LED in brightfield objectives.4Measurement noise is measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment.5On smooth surfaces. Up to 86° on rough surfaces. Other objectives are available.
Table 2. Objective lenses - Interferometry.Source Metrology
| MAG | 10X | 20X | 50X | |||
|---|---|---|---|---|---|---|
| NA | 0.30 | 0.40 | 0.55 | |||
| WD (mm) | 7.4 | 4.7 | 3.4 | |||
| FOV1(µm) | 1410 x 1410 | 700 x 700 | 280 x 280 | |||
| Spatial sampling2(µm) | 1.38 | 0.69 | 0.27 | |||
| Optical resolution3(µm) | 1.38 | 0.69 | 0.30 | |||
| System noise4(nm) | < 5 | |||||
| Maximum slope5(º) | 17 | 24 | 33 | |||
1Maximum field of view with 2/3” camera and 0.25X optics.2Pixel size on the surface.3L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Spatial sampling could limit the optical resolution for interferometric objectives. Values for white LED in interferometric objectives.4Measurement noise is measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment.5On smooth surfaces.
Table 3. Z Performance. Source: Sensofar Metrology
| Z | LINEAR STAGE |
|---|---|
| Vertical range | 20 mm (0.79″) |
| Resolution | 5 nm |
S mart 2, the new integrable areal confocal head from Sensofar
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