S mart 2—The Only Autonomous Areal Confocal Profilometer

上海仪舶实验室自动化 25-01-23 15:06:05

S mart 2—The Only Autonomous Areal Confocal Profilometer

The only autonomous areal confocal profilometer on the market is the S mart 2. It is a breakthrough in the optical field because of its potent features and compact design.

Never before has installing a Sensofar system been so simple; the S mart 2 only requires two single connections, an ethernet cable, and a power source.

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

Due to its small width (90 mm), the integrable head can be installed in areas without obstructing users or production processes.

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

The S mart 2 has all the electronics, including the computing power, inside the head and was created to be incredibly simple to integrate.

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

For a metrological tool to operate correctly, the temperature is essential. A highly effective passive cooling system is the solution to keep the system operational.

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

In contrast to point or line confocal chromatics, the S mart 2 areal confocal capability images an area at a time, so the lateral resolution and X and Y remain the same.

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

The S Mart 2 includes three technologies to measure in the same head, including AI Focus Variation, Confocal, and Interferometry, to scan with the most appropriate technology.

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

Simply concentrate on the surface, and the S mart sensor will handle the rest. The product portfolio for these sensors has been created to meet the automatization needs that are typically present in production lines.

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

The sensor locates the focus, optimizes the light and Z range, and the user receives the result after just one click.

Sensofar

Image credit: Sensofar Metrology

System Specifications

Table 1. Objective lenses - Brightfield.Source: Sensofar Metrology

MAG 5X 10X 20X 50X
NA 0.15 0.30 0.45 0.80
WD (mm) 23.5 17.5 4.5 1.0
FOV1(µm) 2820 x 2820 1410 x 1410 700 x 700 280 x 280
Spatial sampling2(µm) 2.76 1.38 0.69 0.27
Optical resolution3(µm) 1.11 0.55 0.37 0.21
Measurement noise4(nm) 90 35 10 4
Maximum slope5(º) 9 17 27 53

1Maximum field of view with 2/3” camera and 0.25X optics.2Pixel size on the surface.3L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for blue LED in brightfield objectives.4Measurement noise is measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment.5On smooth surfaces. Up to 86° on rough surfaces. Other objectives are available.

Table 2. Objective lenses - Interferometry.Source Metrology

MAG 10X 20X 50X
NA 0.30 0.40 0.55
WD (mm) 7.4 4.7 3.4
FOV1(µm) 1410 x 1410 700 x 700 280 x 280
Spatial sampling2(µm) 1.38 0.69 0.27
Optical resolution3(µm) 1.38 0.69 0.30
System noise4(nm) < 5
Maximum slope5(º) 17 24 33

1Maximum field of view with 2/3” camera and 0.25X optics.2Pixel size on the surface.3L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Spatial sampling could limit the optical resolution for interferometric objectives. Values for white LED in interferometric objectives.4Measurement noise is measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment.5On smooth surfaces.

Table 3. Z Performance. Source: Sensofar Metrology

Z LINEAR STAGE
Vertical range 20 mm (0.79″)
Resolution 5 nm

S mart 2, the new integrable areal confocal head from Sensofar

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