Residual Gas Analyzers (RGA)

Many research and industrial processing companies across the globe utilize Residual Gas Analyzers (RGA) to classify gases located within vacuum environments.

There are 3 grades of RGA systems available from Extrel, which range in ability. The classic Extrel RGA is a basic and economical RGA system. Next, the moderate MAX-LT RGA system allows improved sensitivity and mass range for current chambers. Finally, the diverse MAX system, which provides exceptional resolution and sensitivity to fit the customers’ requirements. The MAX-QMS Series can locate a minimum of 10 parts per billion (ppb) to 100% as the most accurate and repeatable measuring system currently available.

Applications

Product characterization

Look for contaminants in semiconductor processing systems

Check for possible leaks in vacuum furnaces

Search for gases desorbing off of the walls of ultra high vacuum (UHV) chambers

Monitoring headspace of fermentors

Check for possible leaks in vacuum furnaces