Integra Optics
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The Residual Gas Analyzer (RGA) from Extrel enables reliable, full-range pressure measurement at an affordable cost. It includes a Faraday cup detection system with an optional electronic multiplier, providing sensitivity up to 5x10-14 torr.
The Extrel's RGA has an intelligent start-up design with a quadrupole mass analyzer, an ion gauge and a Pirani gauge. It is available in two different mass ranges from 1 to 100 amu or 1 to 300 amu.
The analyzer runs on RS-232C or US communication with Windows® XP or 7 operating systems. It is best suited for vacuum chamber characterization, leak detection and background gas analysis.
Key Features
The main features of the Extrel RGA are as follows:
Reliable and easy to use
Faraday cup allows full-range pressure measurement from 10-4 to 10-11 torr
Addition of multiplier to Faraday cup extends measurement down to 5x10-14 torr
Dual thoria-coated filaments allow electron emission during quadrupole and ion gauge operation
RGA100 and RGA300 measurement probes
Ion and the Pirani gauge functions protect filaments from stress caused by vacuum excursions
Intelligent start-up design offers automatic switching function from Pirani to the ion gauge, and then to quadrupole system
RS-232C or US communication with Windows® XP or 7 operating systems
Ion current amplifier measures ion currents form 10-6 to 10-15A in a single scan
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