Regulus8230: A High Resolution Scanning Electron Microscope

Hitachi’s Regulus8230 is an ultra-high resolution cold-field emission SEM that has been enhanced for sensitive materials and nanostructures.

Image the Most Challenging Specimens

Sophisticated multi-detection system inclusive of energy filtering

Sub-nanometer resolution available even below 1 kV

Comprehend internal sample data with angular adjustable HAADF, ADFand BF

High contrast imaging available at an ultra-low dose with the immersion lens detection system

Image Credit: Hitachi High-Tech Europe

Advanced Nanoanalysis

Enhanced for windowless or annular EDS detectors, thereby providing excellent light element analysis

Superfast, high sensitivity EDS can be realized with annular detectors that have a solid angle of >1 sr

Quick Sample Handling

Quick sample exchange via load lock for samples of up to 200 mm diameter

Users can easily navigate on their sample or holder to determine the right area of interest using acquired SEM images or color optical image

Image Credit: Hitachi High-Tech Europe

Powerful Automation Tools

Users can automatically image huge sample areas over multiple fields of view

Volume microscopy can be done using automated array tomography

Users can automate repetitive or complex procedures with the help of advanced scripting

Precise, calibrated, dimension measurements can be performed with CD-SEM algorithms

Future Proof

Users can load encapsulated oxidation-sensitive specimens (such as Lithium battery components) under inert-gas environments or vacuum

Hydrated or sensitive samples can be images using Hitachi’s patented Ionic Liquid or a cryo stage

Users can add CL for acquiring more data from pharmaceuticals, photonics, or minerals