Precision Surface Metrology Optical Non-contact Profiler Zeta™-300

TheZeta™-300optical surface metrology tool offers multiple measurement modes with integrated acoustic isolation to reduce the effects of sound and air currents on surface measurements. When gathering data on structures that are less than 1µm high, even small vibrations caused by sound and air disturbances can affect the results. Coupled with an optional isolation table, the Zeta-300 delivers accuracy and repeatability unmatched by other optical profilers, and is designed to support both R&D and production environments.

Open microfluidic channel measured by the Zeta-300. Image credit: KLA Instruments™

Flexible Hardware & Software Options

In research, it is often unpredictable as to what type of surface will need to be measured. With this in mind, theZeta-300offers a modular design that allows for a wider range of hardware measurement options as well as software packages:

Film Thickness Spectrometer

DIC/Nomarski for nanometer-scale roughness

Bright-field and Interferometric objectives

Piezo stage for 3 nm z-resolution

Tilt stages, sample holders and vacuum chucks

Automatic feature detect/measure software

Automatic surface area calculation, statistical analysis

...and much more!

User Testimonial

The diversity and speed of the KLA are unmatched qualities of this system that make it indispensable in the lab. The customer service is fast and helped us even with the most unique and special requests we had, including personal software updates.

Florian Stumpf, Fraunhofer Institute IISB, Germany

Application-Specific Metrology

TheZeta-300surface metrology tool supports multiple applications, including those listed below:

LED, PSS & PEC Analysis

Auto Height, Diameter & Pitch for PSS

Analyze photoresist or post-etch PSS bumps

Auto feature detect, roughness for post-epi mesa analysis

2”, 4” & 6” wafer vacuum chucks

Solar Cell and Wafer Analysis

Auto Finger Height, Width & Volume

Poly-Si and Mono-Si Surface Area & Texture

Silicon-Nitride AR Film Thickness

Multi-site and auto finger detect

156mm solar wafer vacuum chuck

Microfluidics and MEMS analysis

Transparent multi-surface profiling of both open and closed channels

Deep trench/well & high aspect ratio feature profiling

Programmable cursors and cross-sections

Ease-of-Use Features

Multi-site sequencing and multi-FOV 3D image stitching with auto-stage option

Auto-slope and waviness compensation

Auto-surface leveling

Auto-feature height, dimensions, angle, area

Auto-linear and areal roughness