Precision Measurement - S lynx 2 Compact 3D Optical System

The S lynx 2 is a compact and versatile 3D optical system for roughness, volume, and critical dimensions measurements.

Image Credit: Sensofar Metrology

The S Lynx 2’s purpose is to collect and analyze data with extraordinary speed. It assures maximum data collection by employing three separate measurement techniques: interferometry, confocal, and AI focus Variation, each quicker than the last. Utilize the PC’s full potential for data processing by performing acquisition computations in the sensor head.

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Streamlined Flexibility

Large Extended Measurements

With the help of the sophisticated stitching features, users can record high-resolution images across a wider region. The novel algorithms span the whole motorized stage range, which is remarkable given the small size of the device at 125 × 75 mm.

Image Credit: Sensofar Metrology

Use the Best Acquisition Technology

Three extremely potent measurement methods—Ai Focus Variation, Confocal, and Interferometry—are included with the S Lynx 2. This dynamic trio ensures unmatched measurement accuracy by enabling data gathering over a broad range of materials using the best technology for each surface.

Ai Focus Variation. Image Credit: Sensofar Metrology

Confocal. Image Credit: Sensofar Metrology

Interferometry. Image Credit: Sensofar Metrology

Throughput is crucial. This system is made to measure data at blazing speeds using all available measuring technologies. The sensor head performs the acquisition computations, freeing up the PC's entire processing capacity for data analysis.

Fast Scan, Fast Analysis

It is crucial to have throughput. This system is made to measure at blazing speeds using all available measuring technologies. Thesensor head carries out the acquisition calculations, freeing up the PC’s whole processing capacity for the data analysis.

Image Credit: Sensofar Metrology

The Most Practical Approach

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Find out how effortlessly the bench-top system combines classic and modern components, combining manual and motorized parts for superior practicality.

Easy Focusing Across Variable Sizes

Fit and focus on samples with ease, thanks to an adjustable column that allows for up to 100 mm of movement. With the motorized Z stage’s 20 mm travel range, users can achieve accuracy and focused concentration on the tiniest samples.

Extended Lifetime

Due to the S Lynx 2’s use of LED light sources and lack of moving parts for imaging, it runs smoothly and does not need frequent replacements, rigorous calibration, or ongoing maintenance.

Simplified Sample Positioning

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With a motorized XY stage that has a travel range of 125 mm × 75 mm, users can place and maneuver the samples with ease. A tip-tilt stage that is precisely aligned to the optical axis makes it simple to level the samples.

Expanded Imaging Capabilities

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During operation, a 6-position motorized nosepiece allows users to switch between objective lenses at any point. Choose from a variety of suitable lenses, some of which include water immersion and extremely long working distances.

Compact Dimensions

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Users can place the system anywhere on the manufacturing floor or in a laboratory, thanks to its modest size and compact design.

Adaptable To the Needs

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With the S Lynx 2, enjoy a hassle-free setup. Since there are no more parts under the table, users can locate it with ease. It only takes two cables to connect the profiler and PC to get it operating.

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Sensoview

Broadening Analysis Horizons

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SensoVIEW is the best analysis program for a variety of applications. It has an entire toolbox for preparing and getting data out of datasets that are 2D and 3D.

Surface Characterization

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SensoVIEW offers committed operators an easy-to-use interface with step-by-step instructions for extracting surface texture and flatness characteristics while adhering to relevant ISO standards, volume calculations, and other features.

Dimensional Measurements

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For contour and profile views, there are several tools for essential dimensions. Every one of them has the capacity to include tolerances and has an auto-adjustment feature that guarantees a comprehensive dimensional examination.

SensoPRO Rapid Quality Control

Automatic recognition of the features of interest

Analysis of a massive datasets (>100 files)

1-second processing time per file

Configurable processing settings and parameters

Command line available for external SensoPRO integration

Pass/Fail reports based on predefined tolerances

Analysis Templates

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Templates can be constructed from any performed analysis, saving all procedures used, including data modifiers, surface texture operators, important dimensions, and reporting settings.

In Need of a Custom Solution?

Sensofar-Tech is able to create and modify any analytical solution needed for the given situation.

Plugin-Based Solutions

SensoPRO offers a large plugin library that covers both bespoke applications and common automation analysis requirements.

Holes

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Dimples

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Bumps

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Surface characterization

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Trenches & Grooves

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Traces

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Applications

The S lynx 2 is a multifunctional system that meets many needs in various contexts, including research and manufacturing. Find out some real-world instances:

Dimensional Measurements

Medical Devices Knee implant. Image Credit: Sensofar Metrology

Advanced Manufacturing Grinding Tool. Image Credit: Sensofar Metrology

Consumer Electronics MEMS. Image Credit: Sensofar Metrology

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System Specifications

Source: Sensofar Metrology

.	.
Measuring principle	Confocal, CSI and Ai Focus Variation
Measurement types	Image, 3D, 3D thickness
Camera	1 Mpx: 1024x1024 px (150 fps)
Confocal frame rate	60 fps
Range of magnifications	2.5X - 100X
Field of view	From 0.14 to 5.6 mm (single shot)
Z stage travel range	20 mm; 5 nm resolution
Max. Z measuring range	Confocal & Ai Focus Variation 12 mm; CSI 1 mm
XY stage range	Motorized 125x75 mm
Max. Extended measurement area1	125 x 75 mm
Tip-tilt stage	Manual up to ±4° of tilting
LED light sources	Blue (460 nm); white (580 nm; center)
Nosepiece	6 position fully motorized
Sample reflectivity	0.05 % to 100%
Sample weight	Up to 3 kg
Sample height2	Up to 100 mm
User management rights	Administrator, supervisor, advanced operator, operator
Advanced Software Analysis	Inc: SensoVIEW; Op: SensoPRO, SensoMAP
Computer requirements	Intel Core i5/i7 processor, Ethernet connectivity, minimum 1920 x 1080 display resolution
Operating system	Microsoft Windows 10 or higher
Dimensions	330x450x540 mm
Weight3	34 kg
Power	Line Voltage 100-240 V AC; frequency 50/60 Hz single phase
Environment	Temperature 10 ºC to 35 ºC; Humidity <80 % RH; Altitude <2000 m

Objective Lenses

Source: Sensofar Metrology

	Brightfield					Interferometric
Magnification	5X	10X	20X	50X	100X	2.5X	5X	10X	20X	50X
NA	0.15	0.30	0.45	0.80	0.90	0.075	0.13	0.30	0.40	0.55
WD (mm)	20	15.8	3.0	1.0	2.0	10.3	9.3	7.4	4.7	3.4
FOV4 (μm)	2820 x 2820	1410 x 1410	700 x 700	280 x 280	141 x 141	5650 x 5650	2820 x 2820	1410 x 1410	700 x 700	280 x 280
Spatial sampling5 (μm)	2.76	1.38	0.69	0.27	0.13	5.52	2.76	1.38	0.69	0.27
Optical resolution6 (μm)	1.11	0.55	0.37	0.21	0.15	2.32	1.34	0.58	0.44	0.32
Measurement noise7 (nm)	120	45	10	4	3	< 5
Maximum slope8 (º)	9	17	27	53	64	4	7	17	24	33

¹ With the 2.5XTI objective. ² Size for top positions of the regulable column and motorized Z stage. ³ Without objectives, or antivibration table. ⁴ Maximum field of view with 2/3” camera and 0.25X optics. ⁵ Pixel size on the surface. ⁶ L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for blue LED in brightfield objectives and for white LED in interferometric objectives. ⁷ Measurement noise is measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment. ⁸ On smooth surfaces. Up to 86° on rough surfaces. Other objectives are available. 9 Values obtained in a VC-E vibration environment. Objective used for Confocal and Ai Focus Variation 50X 0.80 NA and for CSI 50X 0.55NA. Resolution 1024×1024 pixels. Extended uncertainty (U) according to ISO/IEC guide 98-3:2008 GUM:1995, K=1,96 (level of confidence 95%). σ according to 25 measures.

Accuracy and Repeatability

Source: Sensofar Metrology

Standard	Value	Uncertainty (U)	Repeatability (σ)	Technology
Step height (H)	<10 μm	U= (0.005 + H/50) μm	<10 nm	Confocal, Ai FV and CSI
	>10 μm	U = (0.120 + H/120) μm	>10 nm	Confocal, Ai FV and CSI
Area roughness (Sa)	0.79 μm	40 nm	6 nm	Confocal, Ai FV and CSI