Plasma-Therm

Plasma-Therm is an established leading provider of advanced plasma processing equipment with more than 35 years of focus on customer support, innovation, reliability and low cost of ownership.

Plasma-Therm's ICP, RIE and DSE plasma etch and PECVD and HDPCVD thin film deposition systems are used both in R&D and high volume production in applications for solid state lighting, nanotechnology, wireless, MEMS, data storage, renewable energy, photomask and photonics.

We focus on customer service and satisfaction for our global customer base with 17 global sales and service locations and a network of spares warehouses.