Pioneer Two Electron Beam Lithography and Scanning Electron Microscope Imaging

PIONEER^TM Two from Raith is the perfect solution for all researchers and universities with equal requirements for an analytical Scanning Electron Microscope (SEM) and an Electron Beam Lithography (EBL) system. Theoretically, PIONEER Two establishes a new and exclusive class of tools and is the first real EBL/SEM-hybrid available.

PIONEER Two combines all maximum performance elements for specialized EBL and SEM into a single comprehensive turnkey system. Flexibility, user-friendliness, and robustness render PIONEER Two ideal for all those wanting not just to “print” and review their nanostructures but also to access an analytical instrument with the potential for structural and chemical analysis in life or material sciences.

EBL and SEM Imaging

Compact system structure with a small footprint

Integrated latest thermal field emission (TFE, Gemini column) technology with a beam size of 1.6 nm (world’s smallest e-beam diameter within a specialized EBL system)

Modularity and best price performance to suit all research budgets: configurable system with application-oriented options for automation, speed, and SEM-analytics

Laser Interferometer Controlled Stage incorporating modular total sample holder rotation and tilt (thus maintaining complete SEM capabilities) for specialized EBL with maximum positioning accuracy

Real-time multiple-user management: by user authentication and associated specific system parameter administration; users will find their system in the same way as they left it

Many detectors are provided (AsB, ET-SE, inlens EsB, inlens SE, EDX, etc.) for ideal EBL mark registration, SEM-analysis, and SEM-imaging

Much More than an SEM-Pattern Generator Combo

PIONEER Two is the next cost-effective step from a pattern generator upgrade kit toward specialized EBL. In comparison to an advanced SEM with a (registered or third-party) pattern generator and, for example, a piezostage, the PIONEER Two is a comprehensive turnkey EBL system at a very reasonable price—integrated, assisted, and serviced by a single reliable vendor.

Equipped with maximum precision Laser Interferometer Controlled Stage technology, which is an absolute necessity for a professional EBL system, PIONEER Two can match guaranteed EBL system specifications unequivocally.

PIONEER Two Product Details

Main Applications

Material and structural analysis

SEM imaging

Nanolithography

Column Technology

Electron

Gemini

Inlens SE detector

30 kV

Energy selective BSE (EsB) detector option

Stage

Large (vertical) Z travel

2″ full travel

Full rotation and tilt (integrated optional)

Pioneer Two Electron Beam Lithography and Scanning Electron Microscope Imaging

PIONEER Two Laser Interferometer Controlled Stage with integrated rotation/tilt for professional EBL and SEM imagingPIONEER Two EBL Applications: Array of bow-tie nanostructures with 25 nm gap (Amit Zeidler, Technion, Haifa, Israel)PIONEER Two EBL Applications: < 8 nm lines exposed in HSQ resist at 20 keVPIONEER Two EBL Applications: Freestanding multi-terminal graphene device (M. Kühne, MPI Stuttgart, Germany)PIONEER Two EBL Applications: Tunable InAs/InP single-electron transistor (S. Roddaro, NEST, Istituto Nanoscienze-CNR and Scuola Normale Superiore, Pisa, Italy)PIONEER Two EBL Applications: Room temperature single-electron memory device with self-aligned floating gate and triangular channel (T. Xiaohui, Uni Louvain la Neuve, Belgium)PIONEER Two EBL Applications: Optical ADC (T.Dillon, University of Delaware, USA)PIONEER Two EBL Applications: Micro gear pumpPIONEER Two EBL ApplicationsPIONEER Two EBL Applications: Chiral metamaterial consisting of pairs of gold split-ring resonators (M. Decker, University of Karlsruhe, Germany)PIONEER Two EBL ApplicationsPIONEER Two SEM Applications: SEM image of a Bi2-Ca2-Co compound imaged at 1.5 kV, standard Everhart-Thornley secondary electron detectorPIONEER Two SEM Applications: SEM image of a Bi2-Ca2-Co compound imaged at 1.5 kV, inlens secondary electron detector showing superior contrast and surface sensitivityPIONEER Two SEM Applications: SEM image of a Bi2-Ca2-Co compound imaged at 1.5 kV, inlens backscattered electron detector with secondary electron suppression, showing distinct material contrast representing the different metal elementsPIONEER Two SEM Applications: SEM image of a (tilted) ultra-high-resolution SEM sample