Piezo Scanned Flexure Guided Stage with Capacitance Position Sensors - NPS-XY-100A

The NPS-XY-100A is a piezo scanned flexure guided nanopositioning stage with integrated capacitance position sensors. It is made of Super Invar and is capable of sub-nanometer resolution and reproducibility.

It is capable of sub-nanometer resolution and reproducibility. Finite element analysis of the flexure guidance mechanisms has reduced parasitic angular motions to less than 25 micro-radians over the full 100 micron range.

The Super Invar construction (CTE 0.3ppm K^-1, c.f. Al at 23ppm K^-1) of the NPS-XY-100A nanopositioning system minimizes thermal drift, which on a nanometer scale is very important. The unique isostatic mounting system ensures that stresses from the mounting system are properly relieved and establishes the center of the stage as the co-ordinate reference point.

Features

The NPS-XY-100A nanopositioning system features:

> 100 micrometer travel in each axis with sub-nanometer resolution

< 0.005% hysteresis and linearity error

First resonant frequency > 350 Hz

High bandwidths (> 50 Hz) and fast response times

In-situ scanning and stepping response optimization

Use with NPS-Z-15A or NPS-Z-15H for XYZ options

Super Invar construction

Applications

The NPS-XY-100A nanopositioning system is suited use in:

High Precision Microscopy

AFM, SPM, NSOM