Piezo Scanned Flexure Guided Stage - NPS-Z-15B

The NPS-Z-15B is a piezo scanned flexure guided nanopositioning stage with integrated capacitance position sensors. It is capable of sub-nanometer resolution and reproducibility. This stage has been designed to have extremely low angular deviation as it scans.

It is ideal for use in scanning probe microscopy and interferometry, where purity of motion is important.

Features

Features of the NPS-Z-15B nanopositioning stage include:

> 15 micrometer travel with sub-nanometer resolution

< 0.005% hysteresis and linearity error

First resonant frequency > 1.8 KHz

High bandwidths (> 300 Hz) and fast response times

In-situ scanning and stepping response optimization

Robust and reliable

Super Invar construction

Applications

The NPS-Z-15B nanopositioning stage is suited to applications such as:

Scanning Probe Microscopy

NSOM

Atomic Force Microscopy

Precision Engineering

Interferometry

Metrology