PIE Scientific LLC

PIE Scientific specializes in developing plasma technology for ion and electron beam applications. Our company is founded by alumni of the plasma and ion source technology group in the Lawrence Berkeley National Laboratory. After a decade of experience in developing high-resolution high-throughput electron beam inspection (EBI) and review (EBR) equipment for semiconductor capital equipment industry, we realized that existing plasma cleaning technology for contamination removal in electron microscopes doesn't meet the challenging requirements from the semiconductor industry. Therefore, we decided to combine our expertise in plasma source and electron beam imaging equipment and developed a state-of-the-art plasma cleaning solution for electron microscope industry. Our smartClean™ technology has been well-received by the electron beam inspection and electron beam review equipment vendors

Besides plasma cleaning technology we also develop customized high efficient high brightness plasma ion/electron sources for academic and industrial research laboratories. We can also provide electron/ion optics design solutions for sub-nm resolution.

We are located in the heart of San Francisco Peninsula, City of San Mateo, half way between the city of San Francisco and the Silicon Valley.