Photronics, Inc.
The semiconductor and flat panel display industries are more global than ever and Photronics cont……...
P-911K UHV-Compatible Miniature Piezo Hexapod Technology Demonstrator from Physik Instrumente
The compact parallel kinematic design of the P-911K technology demonstrator permits a low overall height of below 90 mm and a diameter of only 100 mm. NEXLINE® piezo stepping motor drives and integrated incremental sensors ensure a position resolution down to 0.1 µm in the linear axes.
Key Features
The key features of the P-911K are:
Ultra-compact
Load capacity to 1.5 kg
Travel ranges to 1.5 mm, to 2°
With NEXLINE® piezo stepping drives
UHV-compatible to 10-9 hPa
Non-magnetic
Ultra-high precision flexure joints
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