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Oxford Instruments Plasma Technology is a Leading Provider of Etch and Deposition Processing Solutions
Plasma technology is used in the fabrication of most semiconductor devices created today across a wide range of industries. It is able to provide unique solutions for the creation and manipulation of matter with atomic scale accuracy.
World-Leading Systems
High-performance, reliable and flexible systems across several etching & deposition technologies. Systems range from single load-lock R&D systems to full clusterable production systems for high volume manufacturing.
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