Optical Profiling with the Compact and Versatile S lynx

The S lynx from Sensofar is a new non-contact 3D surface profiler, purpose-designed as a highly compact high-performance system for both research and industrial applications.

The compact and versatile system can provide measurements of differing textures, roughness, waviness, and structures, all across various surface scales, making it suitable for a range of high-end surface measurement applications. Sensofar’s proprietary 3-in-1 measurement technology ensures that the system delivers ideal performance. SensoSCAN software facilitates exceptionally intuitive operation of the system.

Technology

The S lynx is a high-performance 3D optical profiler integrating three techniques in the same sensor head; confocal, interferometry, and focus variation.

Confocal

Confocal profilers are designed to measure smooth to very rough surfaces. The highest lateral resolution that can be attained by an optical profiler is provided by confocal profiling, reducing spatial sampling to 0.01 µm. This is suitable for critical dimension measurements.

Smooth surfaces with steep local slopes of more than 70° and rough surfaces with slopes of up to 86° can be measured using high NA (0.95) and magnification (150X) objectives. The unique vertical repeatability is provided on the nanometer scale, using proprietary confocal algorithms.

Interferometry

White-light vertical scanning interferometry (VSI) is a commonly used and robust technique to measure surface characteristics, such as transparent film structures or topographies. It is ideal for taking measurements of smooth to moderately rough surfaces, providing nanometer vertical resolution irrespective of the objective’s NA or magnification.

Focus variation

Focus variation is an optical technology designed for taking measurements of the shape of large rough surfaces. Building on Sensofar’s wide knowledge in the realm of combined confocal and interferometric 3D measurements, this technology complements confocal measurements at low magnification. Large vertical range, highest measurement speeds (mm/s), and high slope surfaces (up to 86°) are the other key capabilities of the technology, making it ideal for tooling applications.

Confocal with no moving parts

The confocal scanning technique used in Sensofar’s systems uses a patented micro-display scanning technology. Based on the ferroelectric liquid crystal on silicon (FLCoS) technology, this microdisplay creates a rapidly switching device, without any moving components. This device enables rapid, accurate, and reliable scanning of confocal images.

Equipped with the micro-display and related algorithms, the confocal technique offered by Sensofar provides a vertical resolution superior to other confocal methods, even better than laser scanning confocal systems, all without data filtration.

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Key Design Features

Hardware

The S lynx has a small footprint due to its compact design, with built-in controller and sensor head. It is a powerful system with reliable performance, and can be installed easily.

The high stability of the system is achieved using vibration isolation pads. A vibration isolation table is not required in most cases.

Large range of objectives

The use of premium CF60-2 Nikon objectives provides the largest working distance for every NA. More than 30 objectives are available. The presence of an encoded nosepiece determines a change of objective and changes software automatically.

Adaptable column

A 4-position column developed by Sensofar allows up to 150 mm of height adjustment. Restriction between samples of different heights can be avoided due to the flexible options.

Movement system

The S lynx positioning consists of a manual XY stage with 150 mm x 100 mm of travel range, and a motorized Z stage with high position accuracy and 40 mm of travel range. The movement system also features a tip-tilt goniometer, leading to a point of rotation that stays in focus.

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Applications

Automotive

Watch manufacturing

Semiconductors

Tooling

Optics

Micropaleontology

Micromanufacturing

Microelectronics

Materials science

LCD

Energy

Consumer electronics