Optical Liquid Particle Counting with the LiQuilaz® II S Series

The LiQuilaz^® II optical liquid particle counter from Particle Measuring Systems is a volumetric monitor that has been specifically developed with a range of sizing sensitivities as low as 0.2 µm. It offers high-accuracy analysis for the majority of the process chemicals. This includes hydrofluoric acid and hot corrosive chemicals ranging up to a temperature of 306 °F (152 °C).

The LiQuilaz II particle counter by Particle Measuring Systems offers the same levels of precision, reliabilityand repeatability that customers have received from the instruments for several years. This is a special solution in the extensive line of liquid particle counters. Both RS-485 and Ethernet network communications are featured by the LiQuilaz II liquid particle counter.

Volumetric particle counting provides the highest accuracy possible by quantifying 100% of sample volumes (up to 80 mL/minute) so that short sampling intervals can be used without compromising statistical significance.

Users can find the correct particle counter for their application by using the particle counter finder tool of the Particle Measuring Systems (PMS).

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Features

Particle counter size ranges from 0.2 to 20.0 μm

Maximum 80 mL/minute flow rate

Compact footprint for simple placement anywhere in the process

User-selected particle size threshold

Compatible with an extensive range of process chemicals

Benefits

S02: 0.2 to 2.0 µm, S03: 0.3 to 3.0 µm, S05: 0.5 to 20.0 µm

Applications

In-line and batch sampling

Effervescent chemical measurements utilizing compression sampling

Chemical quality assurance

DI water monitoring

Monitoring of the process bath

Photoresist monitoring

Equipped with chemical delivery systems

Available Accessories

Facility Net

Facility Net Software offers a solution for extensive environmental monitoring, such as a real-time and historical data display. It is compatible with Particle Measuring Systems molecular contamination monitors and particle counters, as well as several third-party products.

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Liquid Installation Kit

The Liquid Installation Kit includes the following features for use in online applications: five caps, a Flaretek^® flaring tool, 25 ft of 1/4 in Perfluoroalkoxy alkanes (PFA) tubingand male connectors.

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Particle Sensor Safety Cabinet

This cabinet accommodates the chemical particle sensor, detects chemical leaks with an external alarmand offers secondary containment when a leak happens. If achemical leak occurs inside the chemical particle counter or sample connections, the system will detect the leak automatically, turn off inlet and outlet sample valves, switch off power to the particle sensorand offer an external alarm contact.

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Capillary Cleaning Kit

The Capillary Cleaning Kit rinses capillaries with a Flaretek^® adapter and consists of two Flaretek^® tube fittings and two 10cc syringes.

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Communication Accessories

There is a need for communication accessories since the LiQuilaz Particle Counter communicates through the RS-485 protocol. Based on the configuration, users might require a BB485 converter and two cables.

If the LiQuilaz instruments are in a daisy-chained manner (that is, connected in series), a standard nine-pin serial cable could link the two instruments. Also, there is a need for a USB-to-serial converter if the computer does not have a nine-pin serial port.

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Corrosive Liquid Sampler Installation Kit

The following are the components of the corrosive Liquid Sampler Installation Kit: three caps, one Flaretek^® flaring tool, 10 ft of 1/4 in poly flow tubing, and 25 ft of 1/4 in Perfluoroalkoxy alkanes (PFA) tubing.

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Downstream Flow Controller

Complete flow control via a liquid particle counter is crucial to guaranteeing precise and actionable data. The Downstream Flow Controllers — FC-200 and FC-100 — complement the high-accuracy liquid particle counters.

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