NorthStar Atomic Layer Deposition (ALD) System from SVT Associates

SVT Associates' NorthStar™ Atomic Layer Deposition (ALD) system is a versatile research deposition tool for thermal or energy enhanced ALD. With up to 8 precursor lines and a hot wall — cross flow deposition chamber, a wide range of applications may be performed from a single system. Sample introduction is rapid and convenient with a quick hatch or the optional load lock. The NorthStar ALD system can be interfaced with other deposition and metrology tools. Integration of in-situ metrology tools and the RoboALD software/system automation increases process reproducibility. SVTA is your source for cost effective atomic layer deposition equipment.

Atomic Layer Deposition System Applications:

High-k Dielectrics

Nanocoatings

Surface Modification Layers

Corrosion protection layers

Moisture barrier layers

Device Encapsulations

MEMS

Photonic Crystals

Atomic Layer Deposition Equipment Options:

Load Lock for rapid sample exchange

Plasma Component

Ozone Delivery System

Residual Gas Analysis — QMS

Quartz Crystal Deposition Monitor

In-Situ Ellipsometry

Transfer to UHV deposition systems