Nexview™ 650 Metrology System for Large Format Inspection and Metrology

TheNexview^™ 650metrology system is an inspection tool for automated measurement of injection molding tooling, PCBs, glass panels, and other samples that require an extended work volume of up to 650 x 650 mm. It offers 2D and 3D measurements of varioussurface features with sub-micron lateral precision and sub-nanometer vertical precision.

Powerful Performance

The measurement technology at the core of the Nexview^™ 650 system is Coherence Scanning Interferometry (CSI).

This non-contact technique offers high-precision, high-value surface metrology perks, including the following:

Measures almost any surface, from rough to very smooth, including thin films, steep slopes, and enormous steps.

Sub-nanometer measurement precision is independent of field magnification

Gage-capable performance offers excellent reliability and reproducibility for even the most demanding manufacturing applications.

SureScan^™ vibration tolerance technology enables reliable operation in almost any environment.

Mx^™ software allows for data sharing with other ZYGO profilers such as ZeGage^™ Pro, NewView^™ 9000, and Nexview^™ NX2.