Monitoring Non-Hazardous Areas with the Laser Process Analyzer LGR-ICOS™ 927 Series

The 927 Series is a general-purpose LGR-ICOS analyzer that is applicable for use in safety and process monitoring procedures that take place in non-hazardous areas, such as within semiconductor cleanrooms, as well as for the continuous monitoring of emission levels within various industries.

By eliminating the need for both consumables and frequent calibration requirements, the LGR-ICOS laser process analyzers have been found to significantly improve both process monitoring processes, the control of industrial and environmental processes, as well as its application in other industries that require a rapid and highly sensitive quantification of trace gases present within ambient air, high purity gases or complex matrices.

Product Features

Simultaneously acquires measurements of multiple gases

Acquired at a rapid rate within seconds

High sensitivity within the parts per billion (ppb) range

Highly accurate results, particularly when utilized for the evaluation of complex gas matrices

Reduced associated costs

Elimination of consumables reduces overall operational costs

Limited moving parts improves overall reliability of the system

Easy to service if necessary

Simple operation

Easy set-up

LCD touchscreen display can be used for full operation requirements

Contextual system diagnostics

Reduced maintenance effort

CE approved

Global approvals for explosion protection available when the LGR-ICOS 950 Series being used