Molecular Beam Epitaxy with the HALO 201 MBE

The HALO 201 MBE is a gas analysis system for molecular beam epitaxy applications. Hiden’s HALO systems are intended for RGA, gas analysisand process monitoring applications such as leak detection, trend analysisand vacuum survey.

Applications

Solar cells

Semiconductor production

Quantum Nanostructure fabrication

Overview

The MBE-specific analyzers are made of suitable materials and are designed for long-term use in MBE conditions, with molybdenum wire in place of copper and a contamination-resistant ion source shroud as standard.

Features

Ion source shroud that is resistant to contamination

RGA operation with a thermal extender during bakeout

Electron multiplier with two Faraday plates and a channelplate

In MBE situations, molybdenum wire is used instead of copper wiring to extend the life of RGA systems

2 × 10^-13 mbar minimum detectable partial pressure