Mad City Labs Nano-HS Series Nanopositioning Systems

The Nano-HS Series is a high speed, multi-axis, precision nanopositioning system with picometer positioning resolution. Offering maximum versatility, the Nano-HS can be configured to provide XY or XYZ motion. Internal position sensors utilizing proprietary PicoQ technology provide absolute, repeatable position measurement under closed loop control. The compact footprint, ultra-low noise characteristics, and a Z-axis resonant frequency of 5kHz make it ideal for metrology applications that require noise floors less than 10 picometers and/or high speed performance.

Features

High speed, multi-axis

XY and XYZ configurations

Z-axis step response time down to 2ms

Z-axis scans up to 300 Hz

Closed loop control

Picometer positioning resolution

Typical Applications

High speed, high resolution positioning

Metrology

AFM

SPM