M-811 Compact Vacuum Compatible Parallel-Kinematics 6-Axis Hexapod Stewart Platform

The PI's smallest off-the-shelf Hexapod positioner for vacuum can handle loads up to 11 lbs. Each individual actuator has a positioning resolution of 40 nm, which is equivalent to a single axis of a traditional stack of six individual single-axis positioners.

Key Features

The salient features of 6-axis Hexapod Stewart platform are:

Miniature high-precision hexapod.

6-axis positioning system with controller & software.

11 lbs load capacity (5 kg).

40 nm actuator resolution.

±200 nm repeatability.

Velocity to 10 mm/second.

Diameter of 136 mm, Height: 114 mm.

Hexapod vs. Serial Kinematics Systems

The Hexapod possesses a single moving platform: this design provides higher stiffness and a large clear aperture. Due to the small movement, mass operations can be performed much faster than with conventional, stacked multi-axis systems.