Plasma Atomic Layer Deposition Processes and Thermal ALD—FlexAL
With maximum flexibility in precursors, process gases, and hardware design inside a single proces……...

The LPS-65 is a low profile linear stage using synchronized piezo stepping motor for high precision and load capacity. The cross roller bearing and big platform are ensuring a smooth and high accurate movement in the range of sub nanometer.
LPS-65 stages can be controlled with our E-861 piezo controller and an optional linear encoder offers nanometer repeatability. Vacuum compatible versions are available.
Key Features
The key features of the LPS-65 are:
Piezo driven stepping motor with subnanometer resolution
Travel range up to 52 mm (2")
Encoder resolution 0.5 nm
Integrated linear scale
Uni-directional repeatability down to 0.005 µm
Maximum speed 10 mm/sec
Load capacity up to 2 kg
The unique PiezoWalk linear motor is non-magnetic and self clamping and provides sub-nanometer resolution. It can be integrated in actuators and linear translation stages as shown in the example above. There is a step mode and a high dynamics analog dither mode within each step.
Closed-Loop Linear Translation Stage, Nanopositioning Stage, PiezoWalk Linear Motor, Nano-Precision
With maximum flexibility in precursors, process gases, and hardware design inside a single proces……...
The Sirocco, named after the warm Mediterranean sirocco winds of Southern Europe and North Africa……...
TESCAN VEGA’s 4th generation Scanning Electron Microscope (SEM) with tungsten filament elec……...
AHP Materials is a specialty materials company focused on the manufacturing and selling of high p……...
Microdry Incorporated 是全球领先的工业微波处理设备制造商,拥有完善的电气和机械设计能力以及制造、……...
-EPMA is an international trade association representing manufacturers of PM products, suppliers ……...
Item North America is a premier provider of precision ball screws for use as a drive mechanism in linear slides, multi-axis motion and complex material handling devices. item ball screws feature hi……
SurPASS™ 3 is capable of measuring the zeta potential over an extensive range of materials and allows the analysis of varied surface properties and their changes. The zeta potential explains ……
AHP Materials is a specialty materials company focused on the manufacturing and selling of high purity specialty metals and compounds. AHP concentrates mainly on Antimony, Cadmium Sulfide, Telluriu……