VELION: FIB-SEM Where FIB Truly Comes First
Focused Ion Beam (FIB) technology provides very versatile capabilities for manufacturing a number……...
The LPS-45 is a linear stage, low profile piezo positioning stage that uses a piezo stick slip motor for high precision and load capacity. The cross roller bearing and the big platform are guaranteeing a smooth and high accurate movement in the range of sub nanometer.
LPS-45 stages can be controlled with our E-870 open loop drive and the E-871 closed loop piezo controller. The alternative linear encoder offers nanometer repeatability. Vacuum compatible and non magnetic versions are available.
Key Features
The key features of the LPS-45 are:
Piezo driven stepping motor with subnanometer resolution
Travel range up to 26 mm (1")
Encoder resolution 2 nm
Optional integrated linear scale
Uni-directional repeatability down to 0.050 µm
Maximum speed 10 mm/sec
Load capacity up to 1 kg
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