Large-Format Stylus Profiler for Wafer Inspection - Dektak XTL™ from Bruker

The new Dektak XTL™ stylus profiler accommodates 350x350mm samples bringing Dektak reproducibility and repeatability to large-format panel and wafer manufacturing.

The Dektak XTL is compact with pneumatic passive isolation and a fully enclosed workstation having a broad, easily accessible interlocking door making it suitable for challenging production floor environments.

It has a dual-camera architecture enabling improved spatial awareness and its high automation level increases manufacturing output. The exclusive Vision64^®Production Interface with pattern recognition can be customized to meet customer needs and renders data collection as a repeatable and intuitive process, reducing operator-to-operator variability.

Key Features

The key features of the new Dektak XTL™ stylus profiler from Bruker are:

Bruker-Exclusive Dual Camera Control™

Navigate to points of interest fast by clicking in live video

Sample to be measured can be quickly oriented by choosing two points in the live video (Make Horizontal)

Measurement setup is simplified by point-and-click scan start and end positions in live video (Teach)

It is possible to precisely determine program fiducials and unlimited measurement sites via 300mm, automated encoded XY stage and 360-degree theta

Reduce errors utilizing Vision64 Production Interface with pattern recognition

Program custom user prompts and also other meta data into the recipe and store to the database

Easily automate analysis routines using Quick Analyzer, which supports most frequently used analyses

Focus the analysis to report only the features required on complex samples using step detection

Simplify data analysis by giving each measurement site unique name and automatically log to database