MKS Instruments, Inc.
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High guiding accuracy and stiffness due to ball screws and crossed roller guides. Stress-relieved aluminum base for highest stability. Vacuum versions available on request. Noncontact limit and reference point switches
Drive types
.xxSD variant: 2-phase stepper motor for high torque even at low velocities and high resolution. Noncontact limit switches. Noncontact optical reference point switch with direction sensing in the middle of the travel range.
.xxAD variant: ActiveDrive DC motor for high velocity: Control via pulse-width-modulated (PWM) signals, the operating voltage is attained via an amplifier integrated in the motor housing.
Position measurement
Versions with DC motor: Rotary encoder
Optional: Integrated linear encoder, installed centrically.
Direct position measurement of the motion platform without influence on the positioning precision by mechanical play or hysteresis in the drivetrainMinimum incremental motion and slow motion
In conjunction with the SMC Hydra controller, versions with stepper motor and integrated linear encoder (L-310.xASD) achieve repeatable minimum incremental motion in the range of the sensor resolution. The same configuration attains constant low velocities of a few sensor increments per second.Fields of application
Precision positioning in industry and research, high duty cycles.
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