Integrated Plasma - Atomflo™-INT

上海仪舶实验室自动化 25-01-23 12:50:58

Integrated Plasma - Atomflo™-INT

Surfx's patented low temperature, particle free, atmospheric pressure argon plasma is now available for integration directly into your bonding and coating machine! The INT series Atomflo plasma system is designed to interface with new or existing process equipment. It can be connected via Ethernet IP for comprehensive process control and data logging. The INT delivers the most advanced surface treatment technology directly within your equipment.

Choose from plasma head sizes ranging from a small 2-mm spot to a 100-mm-wide linear beam.

The INT series plasma system can be incorporated both in-line and as a batch tool. Features include:

Easily pass industry compliance with INT series modules

Real-time monitoring and control of process conditions

Standard 19 inch server rack modules for easy integration

Surfx argon plasma source on six-axis robot

Surfx argon plasma source on six-axis robot. Image Credit: Surfx Technologies, LLC

Surfx argon plasma source on SCARA robot

Surfx argon plasma source on SCARA robot. Image Credit: Surfx Technologies, LLC

Surfx argon plasma source in a work cell

Surfx argon plasma source in a work cell. Image Credit: Surfx Technologies, LLC

The INT series Atomflo plasma system is specifically designed to integrate automated surface treatment into a customer’s process equipment or manufacturing line.

Gas Tray Facilities. Source: Surfx Technologies, LLC

Plasma gases* (choose one)
Type Inlet Fitting** Regulator Max Flow (LPM) Operating Pressure
Argon (Ar) 3/8-inch OD CGA 580 40 0.35-0.7 MPa (50-100 psig)
Helium (He) 3/8-inch OD CGA 580 60 0.35-0.7 MPa (50-100 psig)
Process gases* (choose two)
Type Inlet Fitting** Regulator Max Flow (LPM) Supply Gas Pressure
Oxygen (O2) 1/4-inch OD CGA 540 0.60 0.35-0.7 MPa (50-100 psig)
Nitrogen (N2) 1/4-inch OD CGA 580 0.60 0.35-0.7 MPa (50-100 psig)
5.0 % H2 in argon 1/4-inch OD CGA 580 10.0 0.35-0.7 MPa (50-100 psig)

*Gas purity should be at least 99.99 % (industrial grade).**Swagelok bulkhead connector.

Controller Facilities. Source: Surfx Technologies, LLC

Specifications
Power supply 200 – 240 VAC, 8 A, 50/60 Hz
Air supply (CDA) None
Dimensions (W*D*H) 19 inch server rack compatible Added dimensions see module detail sheet
Weight 23 kg (51 lbs)

Coolant Control Module Facilities. Source: Surfx Technologies, LLC

Specifications
Coolant Distilled or deionized water (1.0 Liter)
Power supply 200 – 240 VAC, 4.1 A, 50/60 Hz
Air supply (CDA) None
Dimensions (W*D*H) 19 inch server rack compatible Added dimensions see module detail sheet
Weight (dry) 9 kg (20 lbs)
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