Integrable Metrology 3D Sensors - S neox

The S neox fulfills the need for utmost flexibility in an integrable sensor and is, therefore, the most versatile industrial system that is commercially available.

FOV (single shot) > 6.7× 5.6 mm

Acquisition time 3s

Optical resolution < 148 nm

System noise < 0.01 nm

Image Credit: Sensofar Metrology

Extreme Versatility with High Performance

The S neox pushes versatility to the extreme: with 4-in-1 technology, offering unprecedented adaptability for shifty application needs and the best measurement flexibility on any surface.

The re-design of a few algorithms has helped increasethe capability and speed of all technologies. Therefore, the option to add a piezoelectric Z motor makes the S neox the main performer. The S neox covers thicknesses measurements ranging from 50 nm to 5 mm.

Image Credit: Sensofar Metrology

Objective Lens

Table 1. Source: Sensofar Metrology

System Specifications

Table 2. Source: Sensofar Metrology

¹ Maximum field of view with 3/2” camera and 0.5X optics. ² Pixel size on the surface. ³ L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Spatial sampling could limit the optical resolution for interferometric objectives. Values for blue LED. ⁴ System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For interferometry objectives, PSI, 10 phase averages. The 0.01 nm are achieved with Piezo stage scanner and temperature-controlled room. Values for green LED (white LED for CSI). Values obtained in a VC-E vibration environment. ⁵ On smooth surfaces. Up to 86° on rough surfaces.

Dimensions

Image Credit: Sensofar Metrology