Integrable Metrology 3D Sensors - S mart

The S mart is the smallest areal confocal sensor currently available, and providesthe ideal combination of compact design and versatility profilometer.

FOV (single shot) > 3.4 × 2.8 mm

Acquisition time 7 s

Optical resolution < 177 nm

System noise < 1 nm

Integrable Metrology 3D Sensors

Image Credit: Sensofar Metrology

Compact Versatility

The S mart offers the essential measurement versatility to deal with a different range of surface types and topographies.

With Sensofar’s 3-in-1 technology — three measurement technologies integrated into a single sensor head through a patented microdisplay approach — the system can easily be switched to the most suitable method for the task at hand. It is a small, economicaland versatile solution.

Integrable Metrology 3D Sensors

Image Credit: Sensofar Metrology

Objective Lens

Table 1. Source: Sensofar Metrology

	Brightfield							Interferometric
Magnification	2.5X	5X	10X	20X	50X	100X	150X	5X	10X	20X	50X	100X
NA	0.075	0.15	0.30	0.45	0.80	0.90	0.95	0.13	0.30	0.40	0.55	0.70
WD (mm)	6.5	23.5	17.5	4.5	1.0	1.0	0.2	9.3	7.4	4.7	3.4	2.0
FOV1 (µm)	6800x5675	3400x2837	1700x1420	850x710	340x284	170x142	113x95	3400x2837	1700x1420	850x710	340x284	170x142
Spatial sampling² (µm)	5.52	2.76	1.38	0.69	0.28	0.14	0.09	2.76	1.38	0.69	0.28	0.14
Optical resolution³ (µm)	2.23	1.11	0.55	0.37	0.21	0.18	0.17	2.76	1.38	0.69	0.30	0.24
System noise (nm)	300	75	25	8	3	2	1	1
Maximum slope⁵ (º)	3	8	14	21	42	51	71	3	8	14	21	42

System Specifications

Table 2. Source: Sensofar Metrology

.	.
Measuring principle	Confocal, CSI and Focus Variation
Measurement types	Image, 3D, 3D thickness, profile and coordinates
Camera	1.2Mpx: 1232x1028 pixels (28 fps)
Confocal frame rate	9,5 fps
Vertical scan range	Linear stage: 40 mm range; 2 nm resolution
Max. Z measuring range	Confocal 36 mm; CSI 7 mm; Focus Variation 25 mm
LED light sources	white 575 nm (default, lifetime 40.000 h – other options available)
Nosepiece	5 position fully motorized
Sample reflectivity	0.05 % to 100%
Advanced Software Analysis	Inc: SensoVIEW; Op: SensoPRO, SensoMAP
Software communication	DLL (C++ or C#, Windows 10^{^®} - 64 bits)XML (any operating system)
Computer	Latest INTEL processor
Operating system	Microsoft Windows 10^{^®}, 64 bit
Cable Length	10 m
Environment	Temperature 10 ºC to 35 ºC; Humidity <80 % RH; Altitude <2000 m

¹ Maximum field of view with 2/3” camera and 0.5X optics. ² Pixel size on the surface. ³ L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Spatial sampling could limit the optical resolution for interferometric objectives. Values for white LED. ⁴ System noise measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment. ⁵ On smooth surfaces. Up to 86° on rough surfaces. Other objectives are available.

Dimensions

Integrable Metrology 3D Sensors

Image Credit: Sensofar Metrology

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