HPR-30: Residual Gas Analyzer for Vacuum Process Analysis from Hiden Analytical

The HPR-30 is a residual gas analyser that is designed to test gases and vapours for vacuum diagnostics and in vacuum processes.

The system can be modified for individual process applications such as plasma etching, MOCVD, CVD, in-process contaminant monitoring and process gas purity.

The HPR-30 system comprises a close-coupled re-entrant aperture for sampling directly within the process region, thereby offering total data integrity and rapid confirmation of process status.

The advanced Hiden 3F series triple filter quadrupole system (optional) can provide part-per-billion (ppb) detection levels, improved abundance sensitivity and high contamination resistance, mainly suited to the testing of aggressive gases in CVD and RIE applications.

Key Features

The main features of the HPR-30 residual gas analyzer are listed below:

Detection to 5ppb

Triple filter mass spectrometer

Mass range options 200, 300, 500 or 1000amu

Enhanced abundance sensitivity

APSI-MS soft ionization mode

Applications

The HPR-30 residual gas analyzer can be applied in the following areas:

Plasma characterization

CVD / MOCVD / ALCVD

Freeze drying

Residual gas analysis

Vacuum processing