Doppler Vibrometer: VibroOne
Polytec’s VibroOne laser Doppler vibrometer is an all-in-one solution developed for non-con……...
HPR-30: Residual Gas Analyzer for Vacuum Process Analysis from Hiden Analytical
The HPR-30 is a residual gas analyser that is designed to test gases and vapours for vacuum diagnostics and in vacuum processes.
The system can be modified for individual process applications such as plasma etching, MOCVD, CVD, in-process contaminant monitoring and process gas purity.
The HPR-30 system comprises a close-coupled re-entrant aperture for sampling directly within the process region, thereby offering total data integrity and rapid confirmation of process status.
The advanced Hiden 3F series triple filter quadrupole system (optional) can provide part-per-billion (ppb) detection levels, improved abundance sensitivity and high contamination resistance, mainly suited to the testing of aggressive gases in CVD and RIE applications.
Key Features
The main features of the HPR-30 residual gas analyzer are listed below:
Detection to 5ppb
Triple filter mass spectrometer
Mass range options 200, 300, 500 or 1000amu
Enhanced abundance sensitivity
APSI-MS soft ionization mode
Applications
The HPR-30 residual gas analyzer can be applied in the following areas:
Plasma characterization
CVD / MOCVD / ALCVD
Freeze drying
Residual gas analysis
Vacuum processing
[HPR-30: Residual Gas Analyzer for Vacuum Process Analysis from Hiden Analytical]相关推荐
Macklow Smith Limited
Macklow Smith Plastometers are the mainstay in many laboratories for ensuring the continuous qual……...
Lincoln Industries
Lincoln Industries is the nation’s leading supplier of products requiring high-performance ……...
Elite Thermal Engineering
Elite Thermal Engineering is founded by leading thermal experts in the photonics industry. ETE is……...
Teledyne LABS
Teledyne LABS is a collection of decades-old Teledyne brands contributing to the research,……...
Crylink
CryLink has engaged in crystal industry over 30 years which develop from Shanghai Daheng Optics a……...
今日仪器
-
Teikruo Corporation
Teikuro Since 1987 providing Hard Chrome Surface Treatment to the North American automotive stamping industry. In addition to automotive stamping dies, our Hard Chrome product is now being utilized……
-
University of Georgia
As the birthplace of public higher education in America, the University of Georgia is inspiring the next generation of entrepreneurs, researchers, and informed citizens who will change the world. F……
-
Scope Technology
Scope Technology Inc. has been in business since 1994 manufacturing affordable Industrial Fiberscopes, Videoscopes and Remote Visual Inspection Devices. We manufacture stock items and we also produ……
