Hitachi Compact Scanning Electron Microscope: The FlexSEM

The FlexSEM from Hitachi is a benchtop or floor-standing electron microscope that integrates the flexibility and performance of a full-size SEM with the ease of use of a tabletop SEM.

Hitachi FlexSEM 1000 Variable-Pressure Scanning Electron MicroscopePlay

Video Credit: Hitachi High-Technologies Europe

Full-SEM Imaging Performance

Resolution that is equivalent to a full-size SEM

Complete control over vacuum level, beam current, and acceleration voltage

Users can observe composition (BSE), morphology (SE), or both on insulating or conductive samples

High-Performance Elemental Analysis

Quick and precise elemental analysis with in-built EDS from leading suppliers

EDS can be operated up to 20 kV to provide access to more peaks

True elemental distribution can be displayed with the help of live peak deconvolution

Safe and Easy Specimen Handling

Users can use the navigation camera to locate their area of interest

Easily overlay and correlate your SEM and optical images

Huge specimens can be handled with the help of the 5-axes stage

Wide areas can be analyzed with image stitching

Go Further

Automated particle analysis provided for fibers, inclusions, asbestos, technical cleanliness, etc.

Users can image hydrated specimens with Hitachi’s patented ionic liquid or cold stage

3D surface metrology can be studied with the help of roughness/angle/depth measurements

Users can add STEM for transmitted electron imaging or CL for pharmaceutical or geological samples

(1) Bacteria, 7 kV, magnification 20,000x; (2) Pharmaceutics, magnification 7,500x; (3) Paper, low-vacuum, 2,700x. Image Credit: Hitachi High-Tech Europe