SPTS Technologies
SPTS Technologies designs, manufactures, sells, and supports etch, deposition and thermal capital……...

The latest HTM-400 high-temperature module from Alemnis can be effortlessly retrofitted to the Alemnis Standard Assembly (ASA). The module can be used in the atmosphere up to a temperature of 200°C.
For higher temperatures, the indenter must be utilized in a vacuum (for instance, within an SEM). The sample and tip are heated separately.
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The HTM-400 module includes the following components:
One indenter holder with a heating capability of up to 400°C (in vacuum)
Three thermal sensors (with less than 0.1°C resolution)
Chiller and water circulation
Cooling braids, tubing, and plate, as well as feedthroughs for the pipes
SEM feedthroughs for power sensors and temperature
A single sample holder with a heating potential of up to 400°C (in vacuum)
Heating power and control, cables, connectors, and electronics
High-temperature control software (two individual temperature control loops are available— one for the sample and one for the tip)
SPTS Technologies designs, manufactures, sells, and supports etch, deposition and thermal capital……...
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