Hiden’s XBS for Molecular Beam Mass Spectrometry

Hiden’s XBS is a system in MBE deposition application for multiple source monitoring. For reliable production quality thin film growth, molecular beam sources require precise control.

The XBS (cross beam source) system from Hiden allows for in-situ monitoring of various sources as well as real-time signal output for accurate deposition control. In molecular beam mass spectrometry, Hiden's XBS is a fantastic instrument.

Applications

MBE monitoring and control

Multiple beam source analysis

Molecular beam studies

High-performance RGA

Outgassing studies

Desorption

Process gas contaminants

Bake-out cycles

Overview

The Hiden XBS RC system is a quadrupole mass spectrometer that can concurrently monitor numerous beam sources at the same time and has a 70° beam acceptance cone that runs transverse to the quadrupole axis.

Beam acceptance apertures are customized for each process chamber source position and are made as interchangeable plug-in pieces to allow for retroactive changes in the case of chamber changes.

The XBS system’s great sensitivity and quick data collection give signals for controlling growth rates as low as 0.01 Angstrom per second.

Features

2 mm beam acceptance aperture — user-configurable beam acceptance aperture

High Sensitivity, detection range has been increased from 100% to 5 ppb, and the mass range has been increased to 510 amu

Monitor 1Å/minute and lower growth rates

Water-cooled shroud with UHV compatibility

Soft ionization and appearance potential mass spectrometry need ion source control

Long-term stability is improved (less than 0.5% height change over 24 hours)

The RF-only pre-filter stage improves contamination resistance

Windows^TM MASsoft control through RS232, USBor Ethernet LAN

For large mass transmission, more sensitivity is available. Automatic alignment of mass scale.

Ion source with a crossbeam and a beam acceptance angle of +/−35° to the transverse axis

In molecular beam experiments, detection limits as low as 30 ions/second have been achieved