Hiden Analytical’s ESPion: Advanced Langmuir Probe for Plasma Diagnostics

The ESPion is an advanced Langmuir probe for performing routine monitoring of I-V plasma characteristic in order to provide users with direct data relating to plasma reproducibility and stability.

Automatic real-time extrapolation of plasma parameters offers comprehensive data on plasma properties for use in characterisation and uniformity monitoring.

The ESPion instrument utilizes Allen Boyd Reynolds (ABR) and Orbital Motion Limited (OML) as standard plasma analysis models.

The Hiden automatic Z-drive is included for spatially resolved measurements across the plasma volume. The standard Z-drive translation options offered by Hiden are 300, 600 and 900mm.

Key Features

The main features of the ESPion are mentioned below:

15 scans/s acquisition rate with D-O-E interface for auto, semi or manual analyses

4.25MOhm at 13.56 MHz cf. 100kOhm

Gas cooled multi-inductor chain for high temperature plasma operation

Gas cooled multi-inductor chain is user replaceable for tuning to other frequencies

Reference probe compensates for low frequency effects e.g. shift in the plasma potential (e.g. anodised chamber walls) or noise (e.g. power supply)

Highest blocking impedance of any commercially available unit

Swiftest pulsed plasma specifications of any commercial probe

Contains all necessary gating circuitry as standard

Self-cleaning cycle to limit probe tip contamination

Interlocked isolation valve, 90° probes, combined linear – rotary drives options available

ESPsoft control via RS232, RS485 or Ethernet LAN

300, 600 or 915mm auto linear drive options

Applications

The ESPion advanced Langmuir probe is applied in the following areas:

Ion flux

Ion density

Floating potential

Electron temperature

Electron energy distribution

Plasma characterisation

Plasma potential