Applying AFM to Electrical and Mechanical Measurements
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The Hauzer Flexicoat® 850 coating machine is a multi-purpose device from the Hauzer Flexicoat® series. It is protected with four interchangeable chamber walls to provide optimum flexibility for numerous applications, including piston rings in a Rapid Ring Coater and cutting tools in a Rapid Tool Coater.
The Flexicoat® 850 system includes a combination of different deposition technologies, such as sputtering, arc, HIPIMS+, CARC+ and PACVD, and can be enhanced with new technology at any time. It comes with a wide range of coatings to suit different applications, such as tribological, decorative or tool coating.
Key Features
The main features of the Hauzer Flexicoat® 850 coating machine are as follows:
Flexible PVD coating equipment
Hybrid process in one machine
Small footprint
Four interchangeable walls for maximum flexibility
Short cycle times
Full range of excellent coatings
Hybrid technologies in one machine
Prepared for upgrading with new technologies
Maximum heating power
Rapid convective cooling by nitrogen
Up to 4 cathode positions for fast deposition of coatings
Arc deposition by either full size rectangular cathodes or banks of circular arc cathodes
Accurate control of product temperature, due to rotating thermo couples near the products
Maximum plasma density by closed field Unbalanced Magnetron (UBM) sputtering
Easy access for target replacement
Chamber shields easy to exchange
Optional second door
Retrofitting of technology guaranteed
Suitable for all applications
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