H-850K Parallel Kinematics Hexapod Precision Positioning System for Ultra-High Load from Physik Instrumente

The H-850 parallel kinematics hexapod precision positioning system is used for positioning high loads in six axes of freedom, special requirements have to be met by the positioning system. The H-850KHLC Hexapod aligns elements in vacuum environments with highest precision, the mechanical coupling is adapted to the vacuum chamber‘s characteristics.

Key Features

The key features of the H-850 hexapod precision positioning system are:

Vacuum compatible to 10-6 hPa

Six Degrees of Freedom

Drive: brushless DC motors with gearhead

Sophisticated controller using vector algorithms

Load capacity to 1500 kg

Travel ranges to 340 mm / 60°

Min. incremental motion < 1 µm