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H-850K Parallel Kinematics Hexapod Precision Positioning System for Ultra-High Load from Physik Instrumente
The H-850 parallel kinematics hexapod precision positioning system is used for positioning high loads in six axes of freedom, special requirements have to be met by the positioning system. The H-850KHLC Hexapod aligns elements in vacuum environments with highest precision, the mechanical coupling is adapted to the vacuum chamber‘s characteristics.
Key Features
The key features of the H-850 hexapod precision positioning system are:
Vacuum compatible to 10-6 hPa
Six Degrees of Freedom
Drive: brushless DC motors with gearhead
Sophisticated controller using vector algorithms
Load capacity to 1500 kg
Travel ranges to 340 mm / 60°
Min. incremental motion < 1 µm
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