FlexSEM Compact or Benchtop SEM

The FlexSEM is a tabletop or floor standing electron microscope combining the performance and flexibility of a full size SEM with the simplicity of a tabletop SEM.

Hitachi FlexSEM 1000 Variable-Pressure Scanning Electron MicroscopePlay

Full-SEM imaging performance:

• Resolution similar to a full size SEM• Observe morphology (SE), composition (BSE) or both on conductive or insulating samples• Full control over acceleration voltage, beam current and vacuum level

High-Performance Elemental Analysis:

• Fast and accurate elemental analysis using integrated EDS from leading suppliers• Show true elemental distribution using live peak deconvolution• Operate EDS up to 20kV to give access to more peaks

Safe and easy specimen handling:

• Use the navigation camera to locate region of interest• Easily overlay and correlate your SEM and optical images• Examine wide areas with image stitching• Handle large specimens using the 5 axes stage

Go further:

• Automated particle analysis for technical cleanliness, asbestos, inclusions, fibres, etc.• Image hydrated specimens using a cold stage or Hitachi’s patented ionic liquid• Add STEM for transmitted electron imaging or CL for geological/pharmaceutical samples.• Study 3D surface metrology with depth/angle/roughness measurements

(1) Bacteria, 7 kV, magnification 20,000x; (2) Pharmaceutics, magnification 7,500x; (3) Paper, low-vacuum, 2,700x.