Filmetrics® F54-XY Automated Film Thickness Mapping Tool

TheFilmetrics^®F54-XY film thickness measurement tool is designed for automated sequence measurement of samples up to 200mm round for the F54-XY-200 or 300mm round for the F54-XYT-300.

The F54-XY is available in several wavelength configuration options, which allow for compatibility across a wide range of film thickness measurement applications. Generally, shorter wavelengths are required for measurement of thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films.

Typical samples mapped by the F54-XY include:

Semiconductor fabrication, including photoresist, oxides, nitrides, SOI, wafer backgrinding

LCD, including cell gaps, polyimide, ITO

MEMS, including photoresist, silicon membranes, dielectric stacks

Optical coatings, including hardness coatings, anti-reflection, and filters

The F54-XY hardware platform is available with pattern recognition capability and 3-position automated turret.

Key Features

Integrated microscope and live video

Motorized X-Y stage for measurements at precise, pre-determined locations

Small spot size and autofocus for optimized accuracy

Polar, rectangular, linear, and custom mapping patterns

Intuitive analysis software

Extensive material properties library

Integrated online diagnostics

Easy to save, reproduce, and plot results

24-hour phone, email, and online support

Filmetrics F54-XYT-300 film thickness measurement tool. Image Credit: KLA Instruments™

F54-XY wavelength configurations. Image Credit: KLA Instruments™