Filmetrics® F40: Measure Thickness and Refractive Index

The Filmetrics^® F40 benchtop thin-film analyzer from KLA Instrumentsprovides precise measurements of the refractive index, thicknessand reflectance of multiple films and coatings. Spot size as small as 1 µm allows use on both patterned and unpatterned samples.

It is simple to attach the F40 to an existing microscope using the included C-mount attachment and CCD camera for combined video of the sample surface.

Normally, the F40 configuration is identified for a particular film thickness range, from the F40-UV for measuring films as thin as 4 nm, to the F40-XT measuring films measuring a thickness up to 350 µm.

The F40 might be utilized for a range of thin-film types including:

Display films (cell gaps, polyimides, ITO)

Semiconductor films (process films, photoresist, nitrides, oxides)

Biomedical coatings (membranes, polymer or parylene, implant coatings)

MEMS (Si membranes, photoresist, AlN/ZnO thin film filters)

Listed below are the key features of the F40:

Film thickness measurements range from 4 nm to 350 µm (based on configuration)

CCD camera available with combined video

Spot size ranges from 1 µm to 100 µm (depending on configuration)

Comes with built-in online diagnostics

Intuitive measurement and analysis software

24-hour e-mail, phone, and online support

Optional features for the F40:

Motorized autofocus

XY10 stage base

Broadband UV microscope SS-Microscope-UVX-1

Broadband microscope SS-Microscope-EXR-1

The Filmetrics F40 from KLA Instruments.Image Credit: Filmetrics, a KLA Company

The F40 configuration specifies the film thickness measurement range.Image Credit: Filmetrics, a KLA Company