[db:国别翻译]美国电路技术
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The Filmetrics® F40 benchtop thin-film analyzer from KLA Instrumentsprovides precise measurements of the refractive index, thicknessand reflectance of multiple films and coatings. Spot size as small as 1 µm allows use on both patterned and unpatterned samples.
It is simple to attach the F40 to an existing microscope using the included C-mount attachment and CCD camera for combined video of the sample surface.
Normally, the F40 configuration is identified for a particular film thickness range, from the F40-UV for measuring films as thin as 4 nm, to the F40-XT measuring films measuring a thickness up to 350 µm.
The F40 might be utilized for a range of thin-film types including:
Display films (cell gaps, polyimides, ITO)
Semiconductor films (process films, photoresist, nitrides, oxides)
Biomedical coatings (membranes, polymer or parylene, implant coatings)
MEMS (Si membranes, photoresist, AlN/ZnO thin film filters)
Listed below are the key features of the F40:
Film thickness measurements range from 4 nm to 350 µm (based on configuration)
CCD camera available with combined video
Spot size ranges from 1 µm to 100 µm (depending on configuration)
Comes with built-in online diagnostics
Intuitive measurement and analysis software
24-hour e-mail, phone, and online support
Optional features for the F40:
Motorized autofocus
XY10 stage base
Broadband UV microscope SS-Microscope-UVX-1
Broadband microscope SS-Microscope-EXR-1

The Filmetrics F40 from KLA Instruments.Image Credit: Filmetrics, a KLA Company

The F40 configuration specifies the film thickness measurement range.Image Credit: Filmetrics, a KLA Company
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