FemtoTools – An Oxford Instruments Company

FemtoTools, part of Oxford Instruments, is a Swiss high-tech company specializing in high-resolution, MEMS-based nanoindenters for applications in metallurgy, thin films, and microsystems technology.

Unlike traditional systems that rely on precision-machined components, we utilize advanced semiconductor fabrication techniques to create force sensors from single-crystal silicon wafers. This innovation delivers superior fabrication tolerances, enhancing sensitivity, resolution, and repeatability beyond conventional technology limits. The compact, lightweight design of our sensing elements significantly increases their resonance frequency, enabling precise measurement of rapid events and conducting fatigue or cyclic tests at elevated frequencies.

At FemtoTools, we are redefining nanomechanical testing and shaping the future of nanotechnology.