Examining Components Evolved from a Process or Present in a Vessel with the RGA Series

Residual gas analyzers (RGA) available from Hiden Analytical offer an exclusive window into the vacuum environment for leak detection, contamination monitoringand analysis of target species—for example, water vapor—inside the vacuum chamber.

The Hiden residual gas analyzers are essentially quadrupole mass spectrometers that have been configured in a variety of products to deal with applications in science, technologyand vacuum processing.

The Hiden residual gas analyzers are also fitted with intuitive and multi-level software that provides easy fail-safe* operation for novice users and, at the same time, integrates a wide range of sophisticated and useful features for vacuum experts.

*On-board safety features comprise overpressure protection for both detector and filament by internal measurement, as well as connection for an external overpressure protection device.

The Vacuum Residuals that are Routinely Examined

Hydrogen—this gas is quantified at mass 2 and is of particular interest in UHV applications, where outgassing can be a restricting factor for realizing an ultimate vacuum.

Helium—this gas is quantified at mass 4 and utilized as a search gas for leak detection. The Hiden residual gas analyzers feature a specialized leak detection mode for rapid response analysis of helium.

Water vapor—this is quantified at mass 18 and is the most challenging residual to pump to UHV level but without pumping or baking the vacuum chamber for prolonged periods.

Nitrogen and Oxygen—these are quantified at mass numbers 28 and 32, respectively, with more peaks determined for confirmation at mass numbers 14 and 16. The measurement of a considerable signal for the 'air peaks'is generally the first indication of a chamber leak.

Hydrocarbons—this is investigated at many masses across a mass scan and can usually be detected at mass numbers 41 and 43, 55 and 57, 69 and 71, and 15 for alkanes and alkenes. The RGA broad mass scan with high sensitivity enables users to acquire in-depth information about the contamination level of the chamber.

Volatile Organic Compounds—these are quantified at species-specific masses, such as mass 31 for ethanol, 45 for isopropyl alcohol, 78 for benzene, and 91 for toluene. Hiden Analytical’s RGAs examine these species with a live data display to provide vacuum users with instant and updated data relating to the health and trends of the partial pressure of the crucial vacuum residuals.

Information is utilized for routine leak detection, vacuum chamber monitoring, cutting-edge research studies, and for analyzing vacuum processes.

RGA Series

All residual gas analyzers from Hiden Analytical have been tested for applications and calibrated to offer maximum quality performance. The analyzers are backed by a three-year warranty and also a lifetime service support.

Vacuum furnace monitoring

Vacuum diagnostics

Vacuum process analysis

Leak detection

Reactive sputtering closed-loop control

Contamination analysis

UHV TPD

UHV/XHV surface science

Semiconductor production

Molecular beam studies

The Hiden RGA Series Includes Three Specification Levels

HAL/3F—triple filter mass spectrometers for analytical applications

HALO—for residual gas analysis

HAL/3F PIC—pulse ion counting detection for rapid event studies

HALO 100 RC. Image Credit: Hiden Analytical

HAL/3F. Image Credit: Hiden Analytical

HAL/3F PIC. Image Credit: Hiden Analytical

Key Features/Options

Ultra-fast data acquisition of up to 650 measurements every second

Mass range options—50, 100, 200, 30and 510 amu

Live background subtract

A wide range of ion source and shroud options

Iridium filaments coated with twin burnout-resistant oxide

Integral mass library

High-sensitivity helium leak detectionand mass selectable for optional search gases

Sophisticated analysis capability for interpretation of complex gases

HALO for Residual Gas Analysis

HALO 201 RC. Image Credit: Hiden Analytical

HALO Analyzer and RF Head. Image Credit: Hiden Analytical

Leak detection

Vacuum fingerprint—histogram and peak profile scan

Trend analysis—multiple species of more than 80 partial pressure values can be monitored in real time

Baseline drift and zero blast are removed—vacuum chamber residual gas and vapor species can be compared and analyzed

Detector options:

Faraday-only and Faraday/electron multiplier

Sensitivity with:

Electron multiplier—detection to 2 x 10⁻¹³ mbar

Faraday—detection to 1 x 10⁻¹¹ mbar

Highest operating pressure:

1 x 10⁻⁴ mbar



Hiden’s RGA sensitivity for helium is 5 times* that of a typical analyzer providing excellent leak detection performance. Image Credit: Hiden Analytical

*Based on reference to published relative sensitivity data.

Features

Detector options—Faraday or Faraday and electron multiplier

Mass range options—100, 200, and 300 amu

Automatic DeSat™ mode enables high-speed scanning even when saturating signals are present

Automated Electronic Beam Shutter EBS™ improves the suppression of noise

Controlled by PC Windows

HAL/3F—Triple Filter Mass Spectrometer for Analytical Applications



Triple Filter Assembly. Image Credit: Hiden Analytical



HAL/3F Analyzer and RF Head. Image Credit: Hiden Analytical



3F Performance includes enhanced sensitivity for high-mass species and increased resolution capabilities. Image Credit: Hiden Analytical

Application-specific ionization sources for molecular beam measurement, gas analysis, and XHV/UHV studies

Triple mass filter technology for high sensitivity, with abundance sensitivity and improved resistance to contamination

Mass range options:

50, 200, 300and 510 amu

Series 1000 for mass range options of up to 5000 amu

Detection limit:

Single-channel electron multiplier—2 x 10⁻¹⁴ mbar

Faraday detector—1x10⁻¹¹ mbar

Highest operation pressure:

2 x 10⁻⁴ mbar

Features

Detector—Faraday and single-channel electron multiplier

Mass range options—50, 200, 300and 510 amu

Automatic DeSat™ mode enables high-speed scanning even when saturating signals are present

Automated Electronic Beam Shutter EBS™ improves the suppression of noise

Complete control of field axis potential—ion energy, electron energyand ion source emission

HAL/3F PIC—Triple-Filter Mass Spectrometer with Pulse Ion Counting Detection for Fast Event Studies

Seven-decade continuous measurement from 1 c/s to 10⁷ c/s

Pulse ion counting detection for transient gas analysis and rapid event studies, such as UHV TPD

Includes multi-channel scaler detector option with 50-ns time resolution

Mass range options:

Detection limit with pulse ion counting detector of less than 5 x 10⁻¹⁵ mbar

50, 300, and 510 amu

Series 1000 for mass range options of up to 5000 amu

Highest operation pressure:

1 x 10⁻⁴ mbar with Faraday option

5 x 10⁻⁶ mbar



High-quality transient data acquisition at PPM/PPB levels. Ideal for UHV TPD. Image Credit: Hiden Analytical



HAL/3F PIC. Image Credit: Hiden Analytical



HAL/3F PIC Analyzer and RF. Image Credit: Hiden Analytical

Features

More than 650 measurements per second

Seven-decade dynamic range

Signal gating for pulsed studies

Detection up to <5 x 10⁻¹⁵ mbar

PCA mode—predictive count accumulation mode considerably extends the life of the electron multiplier

Multi-channel scaler option with a time resolution of 50 ns

Hiden Analytical creates many different types of ion sources that can be accommodated into its entire range of RGAs. Types of ion sources are important for the performance of RGAs, and added to this, the potential to specify the types of sources needed by users ensures that Hiden Analytical’s RGAs are custom-configured for particular applications.