[db:国别翻译]美国米拉克龙公司
/9-9-I-9M-9M-9-9A-9-9G-9G-9E-1/ 米拉克龙(Milacron)是在270亿美元的塑料技术和加工行业中高度工程……...
CAMECA's new generation Shallow Probe: the metrology solution for advanced integration of new processes.
The EX-300 benefits from over a decade of experience with LEXES technology in the semiconductor industry: dozens of LEXFAB-300 Shallow Probes have been installed at the top-ten semiconductor fabrication facilities worldwide. The EX-300 is targeted for new challenging applications such as SiGe and HKMG, and it is designed to accelerate the time to marketof advanced logic & memory devices while achieving high production yield.
The non-contact, non-destructive LEXES technique is a unique solution for direct measurement of the chemical composition at the surface and near surface.
The EX-300 offers a panel of complementary capabilities enlarging the domains of classical metrology to current challenging processes:
Ultra shallow implants: Monitoring of low energy, high concentration implants.
Strained silicon process control:Chemical composition and thickness in epitaxial layers such as B:SiGe andP:SiC, with no limitation in the layer composition.
HKMG metrology: Both the oxydes and the metal are controled by one single EX-300 platform.
CAMECA's EX-300 delivers enhanced long-term stability with better vacuum limit. The below graph shows reproducibility over several months for an average As dose of 1.97e15 at/cm2 with a global RSD (1σ) of 0.622%.
/9-9-I-9M-9M-9-9A-9-9G-9G-9E-1/ 米拉克龙(Milacron)是在270亿美元的塑料技术和加工行业中高度工程……...
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