Eulitha AG

Eulitha AG is a spin-off company of the Paul Scherrer Institute, Switzerland. It specializes in the development of lithographic technologies for applications in photonics, optoelectronics, semiconductors and biotech.

It manufactures and markets nano-patterned samples and templates using its own PHABLE™ tools and state-of-the-art e-beam lithography systems. PHABLE™ is the brand name of its proprietary photolithography platform, which includes exposure tools and wafer patterning services.

The PHABLE-Technology is a breakthrough for low-cost production of sub-micron periodic structures over large-areas with a non-contact exposure system.

Products and solutions:

Equipment

PhableR 100

Nano-patterned Products

Silicon templates for nano imprint

Quartz stamps for nano imprint

Nickel stamps for nano imprint

Standard photonic stamps

Photomasks, phase gratings

Custom patterning projects, consulting

E-beam lithography services

Technologies

PHABLE™

E-beam lithography

Photolithography

Thin film etching and deposition